Reference : Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k P...
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Physics
http://hdl.handle.net/10993/42690
Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated
English
Abessolo Ondo, Dominique [Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg]
Loyer, Francois [Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg]
Werner, Florian mailto [University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit >]
Leturcq, Renaud [Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg]
Dale, Phillip mailto [University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit >]
Boscher, Nicolas [Materials Research and Technology Department, Luxembourg Institute of Science and Technology]
2020
Appl. Polym. Mater.
Yes
International
http://hdl.handle.net/10993/42690
https://pubs.acs.org/doi/10.1021/acsapm.9b00759

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