Article (Scientific journals)
Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated
Abessolo Ondo, Dominique; Loyer, Francois; Werner, Florian et al.
2020In ACS Applied Polymer Materials
Peer reviewed
 

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Disciplines :
Physics
Author, co-author :
Abessolo Ondo, Dominique;  Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Loyer, Francois;  Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Werner, Florian ;  University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Leturcq, Renaud;  Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Dale, Phillip ;  University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Boscher, Nicolas;  Materials Research and Technology Department, Luxembourg Institute of Science and Technology
External co-authors :
yes
Language :
English
Title :
Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated
Publication date :
2020
Journal title :
ACS Applied Polymer Materials
Peer reviewed :
Peer reviewed
Available on ORBilu :
since 02 March 2020

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