Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated
Abessolo Ondo, Dominique; Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Loyer, Francois; Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Werner, Florian ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Leturcq, Renaud; Materials Research and Technology Department, Luxembourg Institute of Science and Technology, Luxembourg
Dale, Phillip ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Boscher, Nicolas; Materials Research and Technology Department, Luxembourg Institute of Science and Technology
External co-authors :
yes
Language :
English
Title :
Atmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated