Article (Scientific journals)
Classification of states and model order reduction of large scale Chemical Vapor Deposition processes with solution multiplicity
Koronaki, E.D.; Gkinis, P.A.; Beex, Lars et al.
2018In Computers and Chemical Engineering, 121, p. 148-157
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Keywords :
Multiplicity of states; Support Vector Machines; Classification; Reduced order modeling; Artificial Neural Networks; Data-driven models; Chemical Vapor Deposition
Abstract :
[en] This paper presents an equation-free, data-driven approach for reduced order modeling of a Chemical Vapor Deposition (CVD) process. The proposed approach is based on process information provided by detailed, high-fidelity models, but can also use spatio-temporal measurements. The Reduced Order Model (ROM) is built using the method-of-snapshots variant of the Proper Orthogonal Decomposition (POD) method and Artificial Neural Networks (ANN) for the identification of the time-dependent coefficients. The derivation of the model is completely equation-free as it circumvents the projection of the actual equations onto the POD basis. Prior to building the model, the Support Vector Machine (SVM) supervised classification algorithm is used in order to identify clusters of data corresponding to (physically) different states that may develop at the same operating conditions due to the inherent nonlinearity of the process. The different clusters are then used for ANN training and subsequent development of the ROM. The results indicate that the ROM is successful at predicting the dynamic behavior of the system in windows of operating parameters where steady states are not unique.
Disciplines :
Engineering, computing & technology: Multidisciplinary, general & others
Author, co-author :
Koronaki, E.D.
Gkinis, P.A.
Beex, Lars ;  University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Engineering Research Unit
Bordas, Stéphane ;  University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Engineering Research Unit
Theodoropoulos, C.
External co-authors :
yes
Language :
English
Title :
Classification of states and model order reduction of large scale Chemical Vapor Deposition processes with solution multiplicity
Publication date :
September 2018
Journal title :
Computers and Chemical Engineering
ISSN :
1873-4375
Publisher :
Elsevier, Oxford, United Kingdom
Volume :
121
Pages :
148-157
Peer reviewed :
Peer Reviewed verified by ORBi
Focus Area :
Computational Sciences
Available on ORBilu :
since 12 November 2018

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