Article (Scientific journals)
Thickness dependence of the resistivity of platinum-group metal thin films
Dutta, S.; Sankaran, K.; Moors, Kristof et al.
2017In Journal of Applied Physics, 122 (2)
Peer reviewed
 

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Keywords :
Interfaces (materials); Thickness dependence; Thin films; Grain boundaries; Copper; Iridium; Platinum; Platinum metals; Ruthenium; Surface scattering; Ab initio calculations; Electron mean free path; Grain boundary scattering; Mayadas-Shatzkes model; Platinum group metals; Specular scattering; Surrounding materials
Abstract :
[en] We report on the thin film resistivity of several platinum-group metals (Ru, Pd, Ir, and Pt). Platinum-group thin films show comparable or lower resistivities than Cu for film thicknesses below about 5 nm due to a weaker thickness dependence of the resistivity. Based on experimentally determined mean linear distances between grain boundaries as well as ab initio calculations of the electron mean free path, the data for Ru, Ir, and Cu were modeled within the semiclassical Mayadas-Shatzkes model [Phys. Rev. B 1, 1382 (1970)] to assess the combined contributions of surface and grain boundary scattering to the resistivity. For Ru, the modeling results indicated that surface scattering was strongly dependent on the surrounding material with nearly specular scattering at interfaces with SiO2 or air but with diffuse scattering at interfaces with TaN. The dependence of the thin film resistivity on the mean free path is also discussed within the Mayadas-Shatzkes model in consideration of the experimental findings.
Disciplines :
Physics
Author, co-author :
Dutta, S.;  Imec, Leuven, Belgium
Sankaran, K.;  Imec, Leuven, Belgium
Moors, Kristof ;  University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Pourtois, G.;  Imec, Leuven, Belgium
Van Elshocht, S.;  Imec, Leuven, Belgium
Bömmels, J.;  Imec, Leuven, Belgium
Vandervorst, W.;  Imec, Leuven, Belgium
Tokei, Z.;  Imec, Leuven, Belgium
Adelmann, C.;  Imec, Leuven, Belgium
External co-authors :
yes
Language :
English
Title :
Thickness dependence of the resistivity of platinum-group metal thin films
Publication date :
2017
Journal title :
Journal of Applied Physics
ISSN :
0021-8979
Publisher :
American Institute of Physics Inc.
Volume :
122
Issue :
2
Peer reviewed :
Peer reviewed
Focus Area :
Physics and Materials Science
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