Electron scattering; Electron transport; Fermi's golden rule; Grain boundaries; Nanowires; Resistivity scaling; Semiclassical Boltzmann equation; Surface roughness; Thin films; Boltzmann equation; Electron transport properties; Quantum theory; Surface scattering; Boltzmann transport equation; Fitting parameters; Metallic thin films; Quantum mechanical; Statistical properties; Surface roughness scattering
Résumé :
[en] A modeling approach, based on an analytical solution of the semiclassical multi-subband Boltzmann transport equation, is presented to study resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scattering. While taking into account the detailed statistical properties of grains, roughness and barrier material as well as the metallic band structure and quantum mechanical aspects of scattering and confinement, the model does not rely on phenomenological fitting parameters.
Disciplines :
Physique
Identifiants :
eid=2-s2.0-84992372777
Auteur, co-auteur :
MOORS, Kristof ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Sorée, B.; Physics Modeling and Simulation (MSP), IMEC, Kapeldreef 75, Leuven, Belgium, University of Antwerp, Physics Department, Groenenborgerlaan 171, Antwerpen, Belgium, KU Leuven, Electrical Engineering (ESAT) Department, Kasteelpark Arenberg 10, Leuven, Belgium
Magnus, W.; Physics Modeling and Simulation (MSP), IMEC, Kapeldreef 75, Leuven, Belgium, University of Antwerp, Physics Department, Groenenborgerlaan 171, Antwerpen, Belgium
Co-auteurs externes :
yes
Langue du document :
Anglais
Titre :
Resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scattering
