Dillmann, F.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany
Marso, Michel ;
Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany Hardtdegen, H.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany
Kordoš, P.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany
Lüth, H.; Institute of Thin Film and Ion Technology (ISI), Research Centre Jülich, D-52425 Jülich, Germany
Brennemann, A.
Tegude, F. J.
Kwaspen, J. M. M.
Kaufmann, L. M. F.