Backgating high-current and breakdown characterisation of AlGaN/GaN HEMTs on silicon substrates
English
Kuzmik, J.[Institute for Solid State Electronics, Vienna University of Technology, Floragasse 7, , A-1040 Vienna, Austria, On leave from IEE Slovak Academy of Sciences]
Blaho, M.[Institute for Solid State Electronics, Vienna University of Technology, Floragasse 7, A-1040 Vienna, Austria]
Pogany, D.[Institute for Solid State Electronics, Vienna University of Technology, Floragasse 7, A-1040 Vienna, Austria]
Gornik, E.[Institute for Solid State Electronics, Vienna University of Technology, Floragasse 7, A-1040 Vienna, Austria]
[en] Backgating effect as well as breakdown and high-current performance of AlGaN/GaN HEMTs on silicon substrates are studied. The material structure of investigated devices differ in the thickness of stressrelaxing intermediate layer sequence (~1 μm and ~2.5 μm thick). It is shown that the transistor backgating effect is reduced for the thicker sequence. Similarly, the reverse gate current is two orders of the magnitude lower and the gate-drain breakdown voltage increases substantially in devices with the thicker sequence. Increase from ~40 V to ~160 V of the HEMT blocking capability measured under electrostatic discharge-like conditions is also observed.