Ultrafast and Highly-Sensitive Photodetectors with Recessed Electrodes Fabricated on Low-Temperature-Grown GaAs
English
Mikulics, M.[Max-Plank-Institute for Radioastronomy, D-53121Bonn, Germany, and Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany, and Institut fuer Hochfrequenztechnik,Technische Universitaet Braunschweig, D-38106 Braunschweig,]
Wu, S.[Department of Physics and Astronomy and Laboratory for Laser Energetics, University of Rochester, Rochester, NY 14627-0231 USA]
Marso, Michel[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
Adam, R.[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
Förster, A.[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
van der Hart, A.[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
Kordoš, P.[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
Lüth, H.[Institute of Thin Films and Interfaces, Research Centre Jülich, D-52425 Jülich, Germany]
Sobolewski, Roman[Department of Electrical and Computer Engineering, and the Laboratory for Laser Energetics, University of Rochester, Rochester]
[en] We have fabricated and characterized ultrafast metal–semiconductor–metal (MSM) photodetectors with recessed electrodes, based on low-temperature-grown GaAs. The new recessed-electrode MSM geometry led to an improved electric-field distribution inside the photodetector structure and resulted in a 25% breakdown voltage and sensitivity increase with simultaneous four-fold reduction of capacitance, as compared to the identical MSM devices with planar electrodes. Time-resolved studies performed using 100-fs-duration laser pulses showed that recessed-electrode MSMs exhibited 1.0-ps-wide photoresponse transients with no slow after-pulse tails and their photoresponse time was 0.9 ps. The improved transient photoresponse parameters are the main advantages of the recessed-electrode geometry.