[en] Using molecular-dynamics simulation, we study the sputtering of a Pt(111) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle theta(c), the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence of the critical angle theta(c) with the help of the surface corrugation felt by the impinging ion. If a step exists on the surface, sputtering occurs also for glancing incidence theta > theta(c). We demonstrate that for realistic step densities, the total sputtering of a stepped surface may be sizable even at glancing incidence. (C) 2009 Elsevier B.V. All rights reserved.
Disciplines :
Physics
Author, co-author :
Rosandi, Yudi
Redinger, Alex ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Michely, Thomas
M., Urbassek Herbert
External co-authors :
yes
Language :
English
Title :
Competition of terrace and step-edge sputtering under oblique-incidence ion impact on a stepped Pt(111) surface
Publication date :
2009
Journal title :
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
ISSN :
0168-583X
Volume :
267
Issue :
16
Pages :
2769-2773
Peer reviewed :
Peer reviewed
Focus Area :
Physics and Materials Science
Commentary :
23rd International Conference on Atomic Collisions in Solids Phalaborwa, SOUTH AFRICA, AUG 17-22, 2008