Traveling-wave photomixers fabricated on high energy nitrogen-ion-implanted GaAs
English
Mikulics, M.[Institut für Hochfrequenztechnik, Technische Universität Braunschweig, Schleinitzstraße 22, D-38106 Braunschweig Germany and Institute of Bio- and Nanosystems, Research Center Jülich, D-52425 Jülich, Germany]
Michael, E. A.[Physics Institute, University of Cologne, Zuelpicherstrasse 77, D-50937 Cologne, Germany]
Marso, Michel[Institute of Bio- and Nanosystems, Research Center Jülich, D-52425 Jülich, Germany]
Lepsa, M.[Institute of Bio- and Nanosystems, Research Center Jülich, D-52425 Jülich, Germany]
van der Hart, A.[Institute of Bio- and Nanosystems, Research Center Jülich, D-52425 Jülich, Germany]
Lüth, H.[Institute of Bio- and Nanosystems, Research Center Jülich, D-52425 Jülich, Germany]
Dewald, A.[Institute of Nuclear Physics, University of Cologne, Zuelpicherstrasse 77, D-50937 Cologne, Germany]
Stanček, S.[Department of Nuclear Physics and Technology, Slovak University of Technology, SK-81219 Bratislava, Slovak Republic]
Mozolik, M.[Department of Nuclear Physics and Technology, Slovak University of Technology, SK-81219 Bratislava, Slovak Republic]
Kordoš, P.[Institute of Electrical Engineering, Slovak Academy of Sciences, SK-84104 Bratislava, Slovak Republic, and Department of Microelectronics, Slovak University of Technology, SK-81219 Bratislava, Slovak Republic]
[en] The authors report on fabrication and measurement of traveling-wave photomixers based on high energy and low dose nitrogen-ion-implanted GaAs. They used 3 MeV energy to implant N+ ions into GaAs substrates with an ion concentration dose of 3 1012 cm−2. The N+-implanted GaAs photomixers exhibit improvements in the output power in comparison with their counterparts, photomixers fabricated on low-temperature-grown GaAs. The maximal output power was 2.64 W at 850 GHz. No saturation of the output power with increased bias voltage and optical input power was observed. These characteristics make N+-implanted GaAs the material of choice for efficient high power sources of terahertz radiation.