REDINGER, Alex ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
MOUSEL, Marina ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
SIEBENTRITT, Susanne ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit
Language :
English
Title (54) :
Method for manufacturing a semiconductor thin film
Publication date (43-45) :
28 October 2013
Filing date (22) :
October 2013
Patent/publication number (10-11) :
91986
Patent status (13) :
B
Priority number (30) :
H01L21/02, H01L21/36
International classification (IPC) (51) :
H01L21/02, H01L21/36
European classification (ECLA) (52) :
H01L21/02, H01L21/36
Applicant (71) :
Université de Luxembourg, TDK Corporation, Robert Bosch GmbH
