Method for manufacturing a semiconductor thin film

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Patent (Patents)

REDINGER, Alex; MOUSEL, Marina; SIEBENTRITT, Susanne

2013

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https://hdl.handle.net/10993/11619

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Details

Disciplines :

Physics

Inventor :

REDINGER, Alex ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit

MOUSEL, Marina ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit

SIEBENTRITT, Susanne ; University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit

Language :

English

Title (54) :

Method for manufacturing a semiconductor thin film

Publication date (43-45) :

2013

Filing date (22) :

28 October 2013

Patent/publication number (10-11) :

91987

Patent status (13) :

Priority number (30) :

H01L21/02 - H01L21/36

International classification (IPC) (51) :

H01L21/02 - H01L21/36

European classification (ECLA) (52) :

H01L21/02 - H01L21/36

Applicant (71) :

Université de Luxembourg et TDK Corporation

Publication organism (19) :

Ministère de l'Economie et du Commerce Exterieur

Available on ORBilu :

since 21 November 2013

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