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Wet low-temperature gate oxidation for nanoscale vertical field-effect transistors,

Goryll, M.; Moers, J.; Trellenkamp, S. et al.

2003 • In Physica E: Low-Dimensional Systems and Nanostructures, 19 (2003), p. 18-22

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104_physica_E_19_2003_18_22.pdf

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