![]() ; ; et al in Applied Physics A : Materials Science & Processing (2007), 87(3), 491-498 This paper reports on new approaches for growth control of GaN-based heterostructures for high frequency and high power application. First in situ methods are presented and their further development ... [more ▼] This paper reports on new approaches for growth control of GaN-based heterostructures for high frequency and high power application. First in situ methods are presented and their further development discussed [1]. The development leads to a greatly improved observation of growth parameter influences in the MOVPE of GaN. A new growth process is introduced which enhances growth reproducibility [2]. This new growth process is then optimized with respect to the envisaged application. To this end process modeling will be employed. The application envisaged is the AlxGa1−xN/GaNhigh electron mobility transistor (HEMT). At last device results will be presented. All in all it will be shown how fundamental research can drive technology and how basic knowledge can be employed forprocess development with respect to device applications. [less ▲] Detailed reference viewed: 39 (0 UL)![]() Marso, Michel ![]() in Physica Status Solidi A. Applied Research (2001), 188 The electrical characterization of epitaxially grown HEMT layer systems for device fabrication is commonly performed by Hall measurements. However, the ultimate characterization of a HEMT layer system is ... [more ▼] The electrical characterization of epitaxially grown HEMT layer systems for device fabrication is commonly performed by Hall measurements. However, the ultimate characterization of a HEMT layer system is the transistor device itself. The RoundHEMT concept meets the need for a device technology with few fabrication steps that allows a fast feedback to epitaxy while providing an evaluation of important electrical and also processing data. Even though nearly identical Hall data on structures with different thickness and doping concentration of the AlGaN layers suggest similar device properties, the RoundHEMTs resolve remarkable differences in device performance. The best layer structure was used to fabricate HEMTs with IDS = 700 mA/mm, fT = 35 GHz, and fmax = 70 GHz for LG = 0.2 mm. [less ▲] Detailed reference viewed: 94 (0 UL)![]() ; ; et al in Electronics Letters (2001), 37(2001), 1364-1366 AlGaN/GaN Round-HEMTs on silicon substrates have been realised and their static characteristics investigated. The AlGaN/GaN (x = 0.23) material structures were grown on (111) p-Si by LP-MOVPE. Devices ... [more ▼] AlGaN/GaN Round-HEMTs on silicon substrates have been realised and their static characteristics investigated. The AlGaN/GaN (x = 0.23) material structures were grown on (111) p-Si by LP-MOVPE. Devices with 0.3 mm gate length exhibit a saturation current of 0.82 A/mm, a good pinch-off and a peak extrinsic transconductance of 110 mS/mm. Highest saturation current reported so far and static output characteristics up to 20 V demonstrate that the devices are capable of handling 16 W/mm of static heat dissipation without any degradation of their performance. [less ▲] Detailed reference viewed: 101 (0 UL)![]() Marso, Michel ![]() in Solid-State Electronics (1998), 42(1998), 197-200 Detailed reference viewed: 25 (0 UL)![]() ; Marso, Michel ![]() in Proceedings of the 28th European Solid State Devices Research Conference, Bordeaux, France, (1998) Detailed reference viewed: 36 (0 UL)![]() Marso, Michel ![]() in Solid-State Electronics (1997), 41(1997), 25-31 Detailed reference viewed: 42 (0 UL)![]() Marso, Michel ![]() in Proceedings of the 9th International Conference on InP and Related Materials (1997) Detailed reference viewed: 78 (0 UL)![]() ; Marso, Michel ![]() in Proceedings of the 9th International Conference on InP and Related Materials, Hyannis, Massachusetts, USA (1997) Detailed reference viewed: 79 (0 UL)![]() ; ; et al in Proceedings of the Gallium Arsenide Application Symposium GAAS 96, Paris, France (1996) Detailed reference viewed: 39 (0 UL)![]() ; ; et al in Electronics Letters (1996), 32(1996), 2132-2133 A model for thermionic field emission in p-barrier enhanced InP HEMTs is presented indicating that a reduction in the gate leakage of those devices is related to an increase in effective barrier thickness ... [more ▼] A model for thermionic field emission in p-barrier enhanced InP HEMTs is presented indicating that a reduction in the gate leakage of those devices is related to an increase in effective barrier thickness. Good agreement between this model and our experimental data is obtained. [less ▲] Detailed reference viewed: 110 (0 UL)![]() ; ; et al in Proceedings of the 8th International Conference on InP and Related Compounds, Schwäbisch Gmünd, Germany (1996) Detailed reference viewed: 1126 (7 UL)![]() ; Marso, Michel ![]() Book published by Kluver Academic Publishers (1996) Detailed reference viewed: 40 (0 UL)![]() ; Marso, Michel ![]() in Applied Physics Letters (1995), 67(1995), 106-108 We report on the investigation of the room-temperature optoelectronic behavior of a metal–semiconductor–metal two-dimensional electron gas photodiode based on the two-dimensional electron gas of a high ... [more ▼] We report on the investigation of the room-temperature optoelectronic behavior of a metal–semiconductor–metal two-dimensional electron gas photodiode based on the two-dimensional electron gas of a high electron mobility transistor structure. The photodetector is fabricated in the InP/InGaAs material system, without use of Al-containing layers. Optoelectronic measurements on a device with a finger spacing of 3 mm show a full width at half-maximum (FWHM) of the pulse response of <60 ps, which is the resolution limit of our measurement equipment. Low-temperature measurements at 40 K with electro-optical sampling at a wavelength of 890 nm show a FWHM of 1 ps. [less ▲] Detailed reference viewed: 56 (0 UL)![]() Marso, Michel ![]() in Electronics Letters (1995), 31(1995), 589-591 Detailed reference viewed: 108 (0 UL)![]() ; Marso, Michel ![]() in Proceedings of the 25th European Solid State Devices Research Conference, Den Haag, The Netherlands (1995) Detailed reference viewed: 35 (0 UL)![]() Marso, Michel ![]() in Proceedings of the 6th International Conference on InP and Related Compounds, Santa Barbara, California USA (1994) Detailed reference viewed: 81 (0 UL)![]() Marso, Michel ![]() in Proceedings of the 5th International Conference on InP and Related Compounds, Paris, France (1993) Detailed reference viewed: 132 (0 UL)![]() ; ; et al in Proceedings of the 5th International Conference on InP and Related Compounds, Paris, France (1993) Detailed reference viewed: 38 (0 UL) |
||