![]() Sood, Mohit ![]() ![]() ![]() in Solar RRL (2021) Detailed reference viewed: 41 (0 UL)![]() Chu, van Ben ![]() ![]() ![]() in ACS Applied Materials and Interfaces (2021), 13 Detailed reference viewed: 146 (8 UL)![]() ; ; et al in JOURNAL OF MATERIALS CHEMISTRY C (2021), 9(12), 4307-4315 The growth process of zinc oxide (ZnO) thin films by atomic layer deposition (ALD) accompanied by the presence of oxygen gas pulsing is investigated by means of the isotopic tracking of oxygen O-18 from ... [more ▼] The growth process of zinc oxide (ZnO) thin films by atomic layer deposition (ALD) accompanied by the presence of oxygen gas pulsing is investigated by means of the isotopic tracking of oxygen O-18 from the water precursor and oxygen O-16 from the gas. In a previous study [T. Nguyen et al., Results Mater., 2020, 6, 100088, DOI: 10.1016/j.rinma.2020.100088], by means of structural, electrical, and optical characterizations, we identified key growth parameters of this unusual ALD process. Unexpectedly, the influence of molecular oxygen on the crystallography, microstructure, and morphology of the hundred-nanometer- to micrometer-thick ZnO films was significant. In this study, we present an unprecedented methodology by combining isotopic tracers with mass spectrometry to elucidate the role of the two different sources of oxygen atoms during the evolution of the growth. Notably, the use of in situ quartz crystal microbalance (QCM) and Secondary Ion Mass Spectrometry (SIMS) reveals new insights into the reaction mechanism for ZnO thin film growth. On the one hand, the non-negative mass change during the ZnO growth without O-2 gas is attributed to the presence of bare zinc atoms on the surface due to the reaction between monoethyl zinc and hydroxyl groups of the water precursor after the diethyl zinc pulse. On the other hand, the detection of ZnxOyC2H5- ions by Time-of-Flight SIMS (TOF-SIMS) and the mass increase during the O-2 pulse suggest a new reaction mechanism for the ZnO thin film growth in the presence of gaseous O-2 where the ethyl ligand of the zinc precursor can react with O-2 to form ethylperoxy radicals. The formations of the ethylperoxy zinc and/or zinc atoms lead to more adsorption of water to form ethylhydroperoxide during the water pulse, inducing the positive mass change. The use of an isotopic substitution allowed us to unambiguously associate the mass gain with the gradual incorporation of gaseous oxygen throughout the growth process and thereby support the chemical reaction. [less ▲] Detailed reference viewed: 40 (0 UL)![]() ; ; Guennou, Mael ![]() in Results in Materials (2020), 6 The preparation of ZnO thin films with controlled electrical resistivity and optical properties is often challenged by the presence of defects, such as oxygen vacancies or interstitial zinc. Here, we ... [more ▼] The preparation of ZnO thin films with controlled electrical resistivity and optical properties is often challenged by the presence of defects, such as oxygen vacancies or interstitial zinc. Here, we investigate the material properties of ZnO polycrystalline thin films prepared by thermal Atomic Layer Deposition (ALD) with the presence of molecular oxygen pulsing during the growth. By means of structural, electrical and optical characterizations, we identify key growth parameters of this unusual ALD process. Unexpectedly, the influence of oxygen molecules on the crystallography, microstructure and morphology of ZnO films is significant from hundred-nanometers to micrometer thick film. The electrical resistivity of the films grown with oxygen gas shows a dramatic increase from 3 to 4 orders of magnitude. Additionally, photoluminescence measurements reveal that deep-level emissions caused by defects located deep in the band gap can be reduced by applying an adequate pulsing of oxygen gas during the process. Finally, we conclude with a discussion about the degree of consistency between the chemical composition, the inner strain and the optical and electrical properties of the films obtained with the different thermodynamic parameters of growth. Several hypotheses are discussed in order to understand the dominance of (002) orientation in the presence of oxygen during the ALD growth process. [less ▲] Detailed reference viewed: 48 (4 UL)![]() Kameni Boumenou, Christian ![]() in Physical Review Materials (2020) Detailed reference viewed: 204 (23 UL)![]() Werner, Florian ![]() ![]() in Physical Review Applied (2020) Detailed reference viewed: 207 (2 UL)![]() ; ; et al in RSC Adv. (2020), 10 Mesoporous TiO2 films with enhanced photocatalytic activity in both UV and visible wavelength ranges were developed through a non-conventional atomic layer deposition (ALD) process at room temperature ... [more ▼] Mesoporous TiO2 films with enhanced photocatalytic activity in both UV and visible wavelength ranges were developed through a non-conventional atomic layer deposition (ALD) process at room temperature. Deposition at such a low temperature promotes the accumulation of by-products in the amorphous TiO2 films, caused by the incomplete hydrolysis of the TiCl4 precursor. The additional thermal annealing induces the fast recrystallisation of amorphous films, as well as an in situ acidic treatment of TiO2. The interplay between the deposition parameters, such as purge time, the amount of structural defects introduced and the enhancement of the photocatalytic properties from different mesoporous films clearly shows that our easily upscalable non-conventional ALD process is of great industrial interest for environmental remediation and other photocatalytic applications, such as hydrogen production. [less ▲] Detailed reference viewed: 44 (0 UL)![]() Colombara, Diego ![]() in Scientific Reports (2017), 7 Alkali metal doping is essential to achieve highly efficient energy conversion in Cu(In,Ga)Se2 (CIGSe) solar cells. Doping is normally achieved through solid state reactions, but recent observations of ... [more ▼] Alkali metal doping is essential to achieve highly efficient energy conversion in Cu(In,Ga)Se2 (CIGSe) solar cells. Doping is normally achieved through solid state reactions, but recent observations of gas phase alkali transport in the kesterite sulfide (Cu2ZnSnS4) system (re)open the way to a novel gas-phase doping strategy. However, the current understanding of gas-phase alkali transport is very limited. This work (i) shows that CIGSe device efficiency can be improved from 2% to 8% by gas-phase sodium incorporation alone, (ii) identifies the most likely routes for gas-phase alkali transport based on mass spectrometric studies, (iii) provides thermochemical computations to rationalize the observations and (iv) critically discusses the subject literature with the aim to better understand the chemical basis of the phenomenon. These results suggest that accidental alkali metal doping occurs all the time, that a controlled vapor pressure of alkali metal could be applied during growth to dope the semiconductor, and that it may have to be accounted for during the currently used solid state doping routes. It is concluded that alkali gas-phase transport occurs through a plurality of routes and cannot be attributed to one single source. [less ▲] Detailed reference viewed: 294 (14 UL)![]() Meadows, Helen ![]() ![]() in Journal of Physical Chemistry. C, Nanomaterials and interfaces (2014), 118 (3) Detailed reference viewed: 209 (12 UL)![]() ; Larsen, Jes K. ![]() in Solar Energy Materials & Solar Cells (2014), 126 Detailed reference viewed: 191 (7 UL)![]() Berg, Dominik ![]() ![]() in Thin Solid Films (2014), 573 Detailed reference viewed: 270 (1 UL)![]() Steichen, Marc ![]() ![]() ![]() in The Journal of Physical Chemistry (2013) Detailed reference viewed: 182 (12 UL)![]() Gütay, Levent ![]() ![]() in Journal of Crystal Growth (2011), (315), 82-86 Detailed reference viewed: 157 (5 UL) |
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