Influence of carrier supply doping on the RF properties of AlGaN/GaN/SiC high-electron-mobility transistors

in Physica Status Solidi C. Current Topics in Solid State Physics (2005), 2(7), 2611-2614

We have fabricated undoped as well as modulation-doped AlGaN/GaN HEMTs on SiC substrate. The influence of the carrier supply layer on device performance is investigated by Hall, channel conductivity ... [more ▼]

We have fabricated undoped as well as modulation-doped AlGaN/GaN HEMTs on SiC substrate. The influence of the carrier supply layer on device performance is investigated by Hall, channel conductivity, small signal RF and delay time evaluation. While the doping layer improves the DC performance it degrades the RF behaviour of the device with the highest carrier supply doping of 5x1018 cm–3. The channel conductivity measurements show identical dependence of the mobility on carrier concentration for all samples. The saturation velocity, extracted by evaluation of the total delay time as function of the inverse drain current, decreases from 0.86x107 cm/s for the undoped device to 0.7x107 cm/s for the highest doped HEMT. This result shows that the degradation of RF performance is due to the reduction of the effective saturation velocity caused by the carrier supply layer. [less ▲]

Ultrafast Phenomena in Freestanding LT-GaAs Devices

in Acta Physica Polonica A (2005), VOL 107; PART 1

We report on the fabrication and high-frequency performance of our photodetectors and photomixers based on freestanding low-temperature-grown GaAs. The MBE-grown low-temperature GaAs layers are lifted ... [more ▼]

We report on the fabrication and high-frequency performance of our photodetectors and photomixers based on freestanding low-temperature-grown GaAs. The MBE-grown low-temperature GaAs layers are lifted from the native GaAs substrate and transferred on top of variety of host substrates. The freestanding devices exhibit breakdown electrical ¯elds above 200 kV/cm and dark currents below 3 £ 10¡7 A at 100 V bias. Device photoresponse shows 0.55 ps wide electrical transients with voltage amplitudes up to 1.3 V, measured using an electro-optical sampling technique with 100 fs wide laser pulses. Photomixing experiments at 460 GHz yield a 9 times higher output power for the freestanding device on Si/SiO2 host substrate compared to the native substrate. [less ▲]

Low Current Dispersion and Low Bias-stress Degradation of Unpassivated GaN/AlGaN/GaN/SiC HEMTs

in Physica Status Solidi C. Current Topics in Solid State Physics (2005), 2(7), 2676-2679

The performance of unpassivated GaN/AlGaN/GaN/SiC HEMTs with intentionally undoped and doped barrier structures are extensively studied. No drain current dispersion between DC and 50 ns pulses on doped ... [more ▼]

The performance of unpassivated GaN/AlGaN/GaN/SiC HEMTs with intentionally undoped and doped barrier structures are extensively studied. No drain current dispersion between DC and 50 ns pulses on doped devices and less than 10% dispersion on undoped ones is observed. The full (100%) current recovery on undoped sample was measured in 1μs. The drain current extrapolated from 2 GHz large signal measurements corresponds to the measured static drain current confirming negligible current dispersion of our devices. Insignificant (<5 %) degradation in overall device performance parameters (IDs, gm, fT, fmax, Pout) on both undoped and doped structures after 12-hour-long bias stress was obtained. These results documents that suitable device performances can be obtained also on unpassivated GaN-based HEMTs. [less ▲]

MSM varactor diodes based on AlGaN/GaN/SiC HEMT layer structures

in Proc. 5th Intern. Conf. Advanced Semicon. Dev. & Microsystems ASDAM’04 (2004)

The influence of a carrier supply layer on the electrical properties of MSM diodes based on AlGaN/GaN HEMT layer structures is investigated. The voltage dependence of the Schottky contact capacitance ... [more ▼]

The influence of a carrier supply layer on the electrical properties of MSM diodes based on AlGaN/GaN HEMT layer structures is investigated. The voltage dependence of the Schottky contact capacitance allows the use of the device as varactor diode with CMAX / CMIN ratios up to 17, tuneable by contact geometry. The carrier supply doping determines the sheet carrier density of the twodimensional electron gas channel, which is responsible for the transition voltage and the series resistance of the MSM diode. A device based on the highest doped layer structure shows a cutoff frequency as high as 65 GHz. [less ▲]

Impact of layer structure on performance of unpassivated AlGaN/GaN/SiC HEMTs,

in Electronics Letters (2004), 40(1), 78-80

The performance of unpassivated AlGaN=GaN=SiC HEMTs prepared on different MOVPE grown layer structures is reported. An overall improvement of device characteristics using doped structures in comparison to ... [more ▼]

The performance of unpassivated AlGaN=GaN=SiC HEMTs prepared on different MOVPE grown layer structures is reported. An overall improvement of device characteristics using doped structures in comparison to undoped counterpart is observed. This can be demonstrated by IDS of 0.86 and 1.33 A=mm, gm of 220 and 273 mS=mm, fT of 33 and 43 GHz and fmax of 54 and 61 GHz for 0.3 mm gate length devices on undoped and doped structures, respectively. The DC=pulsed I–V characteristics as well as power measurements show insignificant RF dispersion of HEMTs on doped structures. These results underline the advantage of doped layer structures for preparation of high-performance AlGaN=GaN HEMTs. [less ▲]

Influence of a carrier supply layer on carrier density and drift mobility of AlGaN/GaN/SiC high-electron-mobility transistors

in Applied Physics Letters (2004), 84 (2004)

Sheet carrier concentration and low-field drift mobility of intentionally undoped and modulation-doped AlGaN/GaN heterostructures on SiC substrate were evaluated by capacitance-voltage and channel ... [more ▼]

Sheet carrier concentration and low-field drift mobility of intentionally undoped and modulation-doped AlGaN/GaN heterostructures on SiC substrate were evaluated by capacitance-voltage and channel conductivity measurements. Sheet carrier concentration and average mobility at 0 V gate bias correspond to standard Hall results. Sheet carrier density increases from 6.831012 cm22 for the undoped sample up to 131013 cm22 for the device with the highest doping concentration, while the mobility decreases from 1800 to 1620 cm2/V s. The local mobility, on the other hand, depends only on the actual sheet carrier density and is not influenced by the doping concentration of the carrier supply layer. It reaches a maximum value of 2100 cm2/Vs at a carrier density of 331012 cm22. [less ▲]

Nitrogen implanted GaAs for ultrafast photodetectors and photomixers

in Proc. 5th Intern. Conf. Advanced Semicon. Dev. & Microsystems ASDAM’04 (2004)

DC and Pulsed Behaviour of Undoped and Doped AlGaN/GaN/SiC HEMTs before and after Si3N4 passivation

in Proc. 5th Intern. Conf. Advanced Semicon. Dev. & Microsystems ASDAM’04 (2004)

Performance of unpassivated AlGaN/GaN/SiC HEMTs after short-term electrical bias stress

in Solid-State Electronics (2004), 48((2004)), 1825-1828

Performance of unpassivated MOVPE grown AlGaN/GaN/SiC HEMTs under short-term electrical bias stress isreported. Insignificant degradation in DC and RF behaviour of prepared devices after 16 h stress at VD ... [more ▼]

Performance of unpassivated MOVPE grown AlGaN/GaN/SiC HEMTs under short-term electrical bias stress isreported. Insignificant degradation in DC and RF behaviour of prepared devices after 16 h stress at VD ¼ 21 V and VG ¼ 2:5 V is observed. This can be demonstrated by a maximum drain current of 1.03 and 1.01 A/mm and a peak extrinsic transconductance of 233 and 225 mS/mm before and after bias stress, respectively. Consecutive drain voltage sweeps indicates on low current collapse in samples investigated. The RF characteristics show a decrease of the fmax-tof T ratio from 2.23 to 2.15 and the saturated output power density measured at 2 GHz from 3.60 to 3.53 W/mm after the devices were stressed. This result indicates that reliable AlGaN/GaN/SiC HEMTs without passivation can be prepared. However, additional studies are needed to understand if the material structure and/or the device processing is responsible for low current collapse and RF dispersion in these devices. [less ▲]

Generation of 1 THz radiation by photomixing in low-temperature-grown MBE GaAs

in Proc. 5th Intern. Conf. Advanced Semicon. Dev. & Microsystems ASDAM’04 (2004)