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See detailAtmospheric-Pressure Synthesis of Atomically Smooth, Conformal, and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated and Ultrathin Low‑k Polymer Insulating Layers by Plasma-Initiated
Abessolo Ondo, Dominique; Loyer, Francois; Werner, Florian UL et al

in ACS Applied Polymer Materials (2020)

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