Reference : Competition of terrace and step-edge sputtering under oblique-incidence ion impact on...
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Physics
Physics and Materials Science
http://hdl.handle.net/10993/32480
Competition of terrace and step-edge sputtering under oblique-incidence ion impact on a stepped Pt(111) surface
English
Rosandi, Yudi [> >]
Redinger, Alex mailto [University of Luxembourg > Faculty of Science, Technology and Communication (FSTC) > Physics and Materials Science Research Unit]
Michely, Thomas [> >]
M., Urbassek Herbert [> >]
2009
NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
267
16
2769-2773
Yes
International
0168-583X
[en] Using molecular-dynamics simulation, we study the sputtering of a Pt(111) surface under oblique and glancing incidence 5 keV Ar ions. For incidence angles larger than a critical angle theta(c), the projectile is reflected off the surface and the sputter yield is zero. We discuss the azimuth dependence of the critical angle theta(c) with the help of the surface corrugation felt by the impinging ion. If a step exists on the surface, sputtering occurs also for glancing incidence theta > theta(c). We demonstrate that for realistic step densities, the total sputtering of a stepped surface may be sizable even at glancing incidence. (C) 2009 Elsevier B.V. All rights reserved.
http://hdl.handle.net/10993/32480
10.1016/j.nimb.2009.05.051
23rd International Conference on Atomic Collisions in Solids Phalaborwa, SOUTH AFRICA, AUG 17-22, 2008

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