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See detailWet low-temperature gate oxidation for nanoscale vertical field-effect transistors,
Goryll, M.; Moers, J.; Trellenkamp, S. et al

in Physica E (2003), 19(2003), 18-22

In this work, we present an approach towards improving a vertical eld-e ect transistor based on a narrow mesa that is capable of showing complete channel inversion. Contrary to similar concepts it does ... [more ▼]

In this work, we present an approach towards improving a vertical eld-e ect transistor based on a narrow mesa that is capable of showing complete channel inversion. Contrary to similar concepts it does not necessarily require the use of an SOI substrate due to the chosen vertical layer sequence. An important issue during process flow is the limited thermal budget in order to preserve the desired channel length. Here a low-temperature wet oxidation process is investigated to prevent dopant di ffusion in early process steps. Results on the thickness homogeneity and electrical properties of this gate oxide will be presented and discussed. [less ▲]

Detailed reference viewed: 33 (0 UL)
See detailThin low-temperature gate oxides for vertical field-effect transistor, ,
Goryll, M.; Moers, J.; Trellenkamp, St et al

in Proc. 4th Intern. Conf. Advanced Semicon. Dev. & Microsystems (2002)

Detailed reference viewed: 22 (0 UL)