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See detailNon-uniform distribution of induced strain in gate-recessed AlGaN/GaN structure evaluated by micro-PL measurements
Mikulics, Martin; Hardtdegen, Hilde; Gregušová, Dagmar et al

in Semiconductor Science & Technology (2012), 27(10), 105008-105008

Micro-photoluminescence (μ-PL) studies were performed on AlGaN/GaN heterostructure field effect transistors (HFETs) with different gate-recessing depths. It was found that μ-PL is the method of choice for ... [more ▼]

Micro-photoluminescence (μ-PL) studies were performed on AlGaN/GaN heterostructure field effect transistors (HFETs) with different gate-recessing depths. It was found that μ-PL is the method of choice for detecting dry etching damage and simultaneously recording strain and stress in the HFET GaN layer. Lateral sub-μm resolved mapping shows that the strain in the GaN layer after recessing is partially relaxed and non-uniform. [less ▲]

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